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Micro-integratedsolidelectrolyteenvironmentalmonitoringgassensor

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Registration number:G20250290

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Subject classification:

Key words: gas sensor Solid electrolyte MEMS

Green classification:

Publisher:管理人员

Release time:2025-08-09 08:50:03.0

  • Essential information
Name of achievement: Micro-integratedsolidelectrolyteenvironmentalmonitoringgassensor
Result registration number: G20250290 Subject classification:
Green classification: Item keywords: gas sensor  Solid electrolyte   MEMS    
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Xi'an Jiaotong University

The stage of achievement:
Mode of cooperation: face-to-facemeeting Outcome Information:
Countries/regions: Xi'an Xingqing Intellectual property rights:
Introduction: Click to view
Project Introduction With the accelerated advancement of industrialization, the consumption of fossil fuels in all aspects of human society is increasing day by day, and the resulting atmospheric environmental pollution problems are becoming more serious, causing great damage to human survival and health, as well as natural ecological environment. Gas sensors based on solid electrolytes, combined with advanced MEMS and coating technologies, are very important for real-time monitoring and prevention of pollutants such as CO2 and SO2. The project uses Li3PO4 and Li3PO4-Li2SiO3 thin film solid electrolyte films as conductive media to develop gas sensors for environmental monitoring of gases such as CO2 and SO2. Through the use of solid electrolyte films, CO2 The response principle analysis of the SO2 gas sensor was conducted, and an integrated environmental monitoring gas sensor was designed. The appropriate reaction electrode material was selected, combined with the MEMS thin-film process, using thermal resistance evaporation coating technology to deposit a Li3PO4 solid electrolyte film. Screen printing thick-film technology was used to prepare the reaction electrode and heating electrode, completing the development, packaging, and testing of the integrated micro CO2 and SO2 gas sensors, laying the foundation for industrial applications. The micro gas sensor can achieve high-precision monitoring of CO2 and SO2 gases, and it features small size, low power consumption, and low cost. Market Prospect and Application Among many atmospheric pollutants, CO2 and SO2 are the main sources of climate change and smog, mainly produced from various metal smelting, processing of petrochemical products, combustion of industrial and civilian fuels, The emissions of various types of motor vehicle exhaust have caused serious harm to the environment. Due to the imminent danger posed by these polluting gases, it is very necessary to detect them in real-time, quickly, and effectively, as well as to take corresponding prevention and control measures based on the test results. It can be seen that with China's increasing emphasis on environmental protection and management, there will be an urgent and significant demand for high-performance, low-cost gas sensors.
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